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Stanford Nanofabrication Facility: Dry Etching - Choosing a Dry Etching Process & Tool (Part 4 of 4)18:58

Stanford Nanofabrication Facility: Dry Etching - Choosing a Dry Etching Process & Tool (Part 4 of 4)


4
B2
Trion ICP / RIE Dry Etch - Standard Operating Procedures14:38

Trion ICP / RIE Dry Etch - Standard Operating Procedures


27
B1
Stanford Nanofabrication Facility: Dry Etching - Dry Etching Mechanisms (Part 3 of 4)18:38

Stanford Nanofabrication Facility: Dry Etching - Dry Etching Mechanisms (Part 3 of 4)


187
B2
  • 1