US /'toʊrɔɪdəl/
・UK /'tɔ:rɔɪdl/
and the shape of the rim itself is called toroidal.
And the shape of the rim itself is called toroidal,
And so repeating what I said before, we have a dense toroidal plasma in the center that spreads out to the wafer, and there's a number of advantages now of the ICP or HDP mode compared to the CCP mode, in that we can operate one at lower pressures, and we get the separation now of the plasma density and the energy, higher plasma density and a larger range of ion energy.