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    toroid

    US

    ・

    UK

    A1
    n.NounDoughnut-shaped object enclosed by a torus

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    Stanford Nanofabrication Facility: Dry Etching - Basics of Plasmas & Types of Tools (Part 2 of 4)

    23:18Stanford Nanofabrication Facility: Dry Etching - Basics of Plasmas & Types of Tools (Part 2 of 4)
    • I'm going to have, I have RF going to a coil at the outside of the plasma, and what it does, it induces a toroid of plasma, so I have, let's say, three or five turns in the outside of the plasma, and I have a one-turn toroid in the center of my plasma.

      I'm going to have, I have RF going to a coil at the outside of the plasma, and what it does, it induces a toroid of plasma, so I have, let's say, three or five turns in the outside of the plasma, and I have a one-turn toroid in the center of my plasma.

    • But always think of it, we're inducing a single toroid of plasma in an ICP, and I'll show you how we use that to get, we can get a uniform plasma out of it, and we can control, separately, we can control the ion energy.

      But always think of it, we're inducing a single toroid of plasma in an ICP, and I'll show you how we use that to get, we can get a uniform plasma out of it, and we can control, separately, we can control the ion energy.

    B2